Advancements in microelectromechanical systems (MEMS) and silicon microfabrication have enabled pressure sensors to achieve not only lower cost per function, but also higher levels of accuracy, repeatability, and thermal stability. A major limiting factor in high-performance sensor applications remains the inherent temperature dependence of the sensor's output characteristics.

This application note outlines a method for compensating temperature-related performance shifts in piezoresistive pressure sensors. It provides a practical overview of hardware-level compensation techniques. In addition to the approach described herein, AVSensors also offers factory-calibrated and thermally compensated sensor models designed to meet application-specific requirements.