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Introduction

Advancements in microelectromechanical systems (MEMS) and silicon microfabrication have enabled pressure sensors to achieve not only lower cost per function, but also higher levels of accuracy, repeatability, and thermal stability. A major limiting factor in high-performance sensor applications remains the inherent temperature dependence of the sensor's output characteristics.

This application note outlines a method for compensating temperature-related performance shifts in piezoresistive pressure sensors. It provides a practical overview of hardware-level compensation techniques. In addition to the approach described herein, AVSensors also offers factory-calibrated and thermally compensated sensor models designed to meet application-specific requirements.

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